Metal Impurities in Silicon-Device Fabrication

by Klaus Graff

2nd ed. 2000. - Berlin, Heidelberg: Springer Berlin Heidelberg; Imprint: Springer, 2000

Online Book, Datenträger, Online-Ressource - 1 Online-Ressource (XV, 270 p)

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Title:	Metal Impurities in Silicon-Device Fabrication
Statement of Responsibility:	by Klaus Graff
Author / Contributor:	Graff, Klaus [Autor/in]
Link:	DOI-Link (Volltext)
Related work:	Springer Series in Materials Science Printed edition Printed edition Printed edition
Edition:	2nd ed. 2000
Publication:	Berlin, Heidelberg: Springer Berlin Heidelberg; Imprint: Springer, 2000
Media Type:	Book
Carrier Type:	Datenträger, Online-Ressource
Pagination:	1 Online-Ressource (XV, 270 p)
ISBN:	9783642571213; 3642571212
DOI:	10.1007/978-3-642-57121-3
Subject heading:	Optical materials Electronic materials Electronics Microelectronics Materials science
Additional details:	Online-Ressource [Kann nicht per Fernleihe bestellt werden!] Gesamttitelangabe: Springer Series in Materials Science ; 24 RVK (Regensburger Verbundklassifikation): UP 7570 RVK (Regensburger Verbundklassifikation): UP 3100 RVK (Regensburger Verbundklassifikation): UQ 8100 RVK (Regensburger Verbundklassifikation): UP 3000 Sprache: Englisch hbz Verbund-ID: HT020601743

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