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Process engineering analysis in semiconductor device fabrication

Stanley Middleman ; Arthur K. Hochberg
New York [u.a.]: McGraw-Hill, 1993
Monograph, Printed Resource - XVII, 774 S. : graph. Darst.

Title:
Process engineering analysis in semiconductor device fabrication
Statement of Responsibility: Stanley Middleman ; Arthur K. Hochberg
Author / Contributor: Middleman, Stanley ; Hochberg, Arthur K.
Related work:
Publication: New York [u.a.]: McGraw-Hill, 1993
Media Type: Monograph
Carrier Type: Printed Resource
Pagination: XVII, 774 S. : graph. Darst.
ISBN: 0-07-041853-5 : £ 32.95
Subject heading:
  • Halbleiterbauelement
  • Fertigung
Additional details:
  • hbz Verbund-ID: HT004452261

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