Process engineering analysis in semiconductor device fabrication

Stanley Middleman ; Arthur K. Hochberg

New York [u.a.]: McGraw-Hill, 1993

Monograph, Printed Resource - XVII, 774 S. : graph. Darst.

DE-1010 YET8 (keine Angabe)
DE-465 XWQ2386_d D43 (Ausleihbestand)
DE-708 YET/MID

Title:	Process engineering analysis in semiconductor device fabrication
Statement of Responsibility:	Stanley Middleman ; Arthur K. Hochberg
Author / Contributor:	Middleman, Stanley ; Hochberg, Arthur K.
Related work:	McGraw-Hill chemical engineering series
Publication:	New York [u.a.]: McGraw-Hill, 1993
Media Type:	Monograph
Carrier Type:	Printed Resource
Pagination:	XVII, 774 S. : graph. Darst.
ISBN:	0-07-041853-5 : £ 32.95
Subject heading:	Halbleiterbauelement Fertigung
Additional details:	hbz Verbund-ID: HT004452261

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